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Wafer-Level Metalens Testing Platform
Production-Throughput Metalens Characterization System
A production-throughput platform for direct on-wafer metalens characterization. The MetaOptics Modular Wafer-Level Metalens Tester scales metalens test to 300 mm wafers at > 1000 UPH, while sharing the same optical modules and measurement methodology as the MetaOptics manual and automated benchtop testers — so teams ramping from R&D into volume production keep their methodology intact.

Key Features

Built on a highly modular architecture, the manual testing platform prioritizes flexibility and scalability. It provides a practical starting point for precise metalens characterization that is designed to grow alongside your lab's evolving testing requirements.

Production Throughput

Production Throughput

Built for volume manufacturing lines.

Wafer-Scale Handling

Wafer-Scale Handling

Direct on-wafer characterization.

Modular Architecture

Modular Architecture

Shared modules across the tester line.

Multiple Modalities

Multiple Modalities

PSF, MTF, BFP and efficiency in one platform.

Configurable to Your Part

Configurable to Your Part

Tailored per application and sample.

R&D to Production

R&D to Production

R&D to Production

Measurements

Direct on-wafer characterization of metalenses and metasurfaces, with per-die reporting:

  • Point-Spread Function (PSF)
    • MTF
    • FWHM
    • Peak intensity
    • Relative efficiency
  • Wavefront Error (WFE) estimation
  • Free-space fiber coupling efficiency
  • Transmission (T) and total efficiency
  • Back-focal plane (BFP)
    • Angular-resolved intensity
    • Efficiency vs. AOI

Typical Starter System

A representative wafer-level production system, configurable per application:

  • Source module: single fiber-coupled laser diode (or switchable multi-LD)
  • Illumination module: collimated normal-incidence — or bare SM fiber for fiber-coupling metalens devices
  • Wafer handling: 300 mm vacuum chuck with air-cushion transport and pre-scan warpage map
  • Collection module: 50x, NA 0.55 (other magnifications configurable across the 20x – 150x range)
  • Measurement modules — up to four populated
    • Imaging / PSF / MTF / WFE
    • BFP module

Modular Ecosystem & Available Upgrades

Source Modules

Fiber-coupled, TEC-stabilized sources delivered to the illumination module via a single fiber output. Available variants:

  • Single-line fiber-coupled LD
  • Switchable multi-line LD
  • Broadband filtered source
  • External fiber-fed source

Illumination Modules

Conditions the beam that reaches the wafer. Common kinematic interface — any of the following drops into the same slot:

  • Collimated normal-incidence illumination
  • Variable-AOI illumination
  • Bare SM fiber illumination for fiber-coupling metalens work
  • VCSEL-based illumination
  • Finite working distance variants on request

Wafer Handling

Vacuum-clamped wafer chuck with air-cushion-assisted transport and per-die warpage compensation. Configurable for standard wafer sizes and coupon-scale samples:

  • 300 mm vacuum chuck (default)
  • Inserts for 200 / 150 / 100 mm wafers
  • Coupon and custom-sample inserts
  • Pre-scan warpage mapping with per-die Z correction
  • Application-specific fixtures on request

Measurement Modules

Up to four independent stations populated around the objective. Available modules:

  • Imaging / PSF / MTF / WFE
  • Back-focal plane (BFP) imaging
  • Transmission and fiber-coupling efficiency
  • Custom modules for customer-specific workflows

Configuration Range Specifications

SpecificationVISNIR-INIR-II
Wavelength range400 – 700 nm700 – 1100 nm1100 – 1600 nm
Throughput> 1000 UPH
Wafer compatibilityUp to 300 mm
Source optionsSingle LD, Switchable Multi-LD, Broadband + Filter
Total magnification20x – 150x
Supported focal lengthsUp to 5 mm
Angle of incidenceUp to 60°
Typical Z-step10 nm closed-loop piezo; 0.1 µm typical step in MTF / z-scan workflows
Maximum collected NA0.95
Measurement modalitiesMTF · PSF · BFP · Transmission · Fiber-Coupling Efficiency · WFE Estimation
Upgradeable measurement stationsUp to 4

Configurations / enhancements outside these ranges can be discussed on request.

Platform Continuity

The MetaOptics Wafer-Level Metalens Tester sits at the production end of a shared product line. The same source, illumination, and measurement modules run on the MetaOptics manual tester (R&D, prototyping) and the automated benchtop tester. A team that begins on the manual tester and ramps to wafer-level production carries its measurement methodology — and its modules — forward instead of starting from scratch.

Request a Tailored Configuration Quote or a Remote Demo

Connect with us

Singapore (HQ)

Metaoptics Technologies Pte Ltd. 81 Ayer Rajah Crescent, #01-45 Singapore 139967

United States

Metaoptics Inc. 1 Ferry Building, Suite 201 San Francisco, CA 94111

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